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Teaching [link to Duke Registrar]
I was the main teaching assistant for the microelectronics fabrication laboratory course at UCSD for several years which introduced junior, senior and beginning graduate students to the fundamentals of device fabrication and characterization from the wafer level. This course included theory and practice of cleaning techniques, layout, lithography, metal deposition, oxidation, etching and their related characterization techniques, as well as device characterization. At Duke University, I taught a sophomore level course on introduction to microelectronics in 2006. I had hoped to develop a similar course (to the one at UCSD) on device/sensor fabrication and characterization which complemented the theory courses taught in ECE and utilized the clean room facility, however, there did not be sufficient interest nor resources to push this through at the time. |
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Other Activities I am also involved with the Faculty Associates Program (FAP), and assisted in the Sally Ride Science Festival and the Females Excelling More in Math Engineering and Science (FEMMES). With the FAP, the faculty initiate and participate in activities with undergraduates in order to build stronger relationships between the students and the faculty. The Sally Ride Festivals and FEMMES program encourages grade and middle school girls to participate in science and engineering oriented activities in the hope of encouraging them into pursuing technical studies in the future. A project that seems to be fun, according to the girls, is a take on how ultrasound imaging works. The idea is that there is an unknown shape in a black box. You have a row of holes on one side of the box which you can poke a stick in and measure the distance it goes in before contacting the object. By graphing these measurements and making measurements at various angles with the shape, you can get a pretty good idea of what the shape is. |
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Contact Information:
Duke University Edmund T. Pratt School of Engineering Dept. of Electrical and Computer Engineering DUMC 90291 129 Hudson Hall Durham, NC 27708
Office Phone: (919) 314-7966 Email: flu@duke.edu
For Deliveries: Felix Lu Duke University, Dept of ECE 129 Hudson Hall Box 90291 Durham, NC 27708 |
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How to get here from the airport (RDU): Take I-40 West (not 540), to 147 N. From the 147, take Hwy15-501 South, and exit at Morrene Rd. turn left (east). At the intersection with Erwin Rd, Morrene Rd will turn into Towerview Dr. Continue to the second stop sign (Science Drive), and turn left. Go down the hill, and back up. Near the top of the hill, turn right into the guest parking lot. Note that you will have to buy a parking pass. From this lot, you can either walk towards the chapel or walk back out to Science drive and turn right. From Science Drive, at the roundabout, turn right and CIEMAS will be on your right. If you head towards the chapel, CIEMAS will be on the left. |
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Even though I don’t like it, this site may look better when viewed with Internet Explorer.
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Visiting Research Scientist in the Department of Electrical and Computer Engineering |
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Introduction |
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I am a visiting research scientist in the Department of Electrical and Computer Engineering at Duke University and Vice-President of Applied Quantum Technologies, a startup company in the Research Triangle Park area working on high performance optical MEMS applications (e.g. 2-D multicolor, multiple laser beam steering systems approaching 1 µs settling times) and signal processing applications (e.g. automatic target recognition). My research interests include semiconductor materials science, surface science of wafer bonded interfaces, energy conversion technologies, and MEMS based applications.
Brief background My doctoral dissertation work at UCSD focused on plasma-activated silicon-hydrophilic wafer bonding and ion-cut (or Smart-Cut®) films and the electronic properties of these films as a function of how they were delaminated and their thermal history. I worked for the Boeing Company at their Satellite Development Center in El Segundo, CA in the Technology Qualification group doing reliability studies of HBTs and HEMTs in SiGe and III-V systems, and radiation effects on optical fiber. I currently collaborate with Professor Jungsang Kim and his group (MIST) on applications in quantum information science. These include silicon/InGaAs wafer fused heterojunctions for single photon detector applications and MEMS-based applications to quantum based communications and computation activities. |
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For AQT information > |